Veli-Matti Airaksinen

Director, Ph.D.

Email Address: veli-matti.airaksinen@tkk.fi
Office phone number: +358 9 470 26075
Work mobile number: +358 50 341 4766
Room 2167

• In charge of Aalto Nanofab - Micronova Nanofabrication Centre, Faculty of Electronics, Automation and Communications School of Science and Technology Aalto University. Aalto Nanofab provides device processing facilities and services for researchers at Aalto. You are welcome to contact me with any enquiries about the use of the Aalto equipment and facilities at Micronova.

Arja Hjelt

Secretary

Email Address: arja.hjelt@tkk.fi
Office phone number: +358 9 470 22357
Work mobile number: +358 40 560 7344
Room 2168

Paula Heikkilä

Process Engineer

Email Address: paula.heikkilae@tkk.fi
Office phone number: +358 9 470 26051
Work mobile number: +358 50 541 8832
Room 2171

• Responsible for the cleanrooms
• Saftety training for the cleanrooms
• Responsible for keys and clean room access at Micronova
• Processing, e.g. oxides, nitrides, litography, sputtering

Risto Salo

Senior Research Technician

Email Address: risto.salo@tkk.fi
Office phone number: +358 9 470 24674
Work mobile number: +358 50 568 0372
Room 2172

• In charge of cleanroom safety and maintenance.
• Handles gas and equipment installations
• Responsible for chemical safety and waste chemicals
• In charge of the workshop

Erkki Halonen

Senior Research Technician

Email Address: erkki.halonen@tkk.fi
Office phone number: +358 9 470 26076
Work mobile number: +358 50 520 8547
Room 2171

Victor Ovtchinnikov

Senior Research Scientist

Email Address: victor.ovtchinnikov@tkk.fi
Office phone number: +358 9 470 24988
Work mobile number: +358 50 352 3319
Room 2170

• Research in the field of electrical conductivity of silicon implanted SiO₂. Ion-beam mixing of multilayer a-Si/SiO₂ and Ag/SiO₂ structures by Ar and Kr ions for creating of silicon and silver nanoclusters. The structures can be used in optoelectronics and SERS applications. Microfabrication of free standing metal structures. Application of these structures for fabrication of high-impedance surfaces and RF MEMS.
• Responsible for the project "MEMS based reconfigurable high-impedance surfaces for millimetre and submillimetre wave applications".
• Responsible for equipment: ion implanter, OPT sputter, OPT RIE, OPT PECVD, LOMO maskaligner.

Antti Peltonen

Process Engineer

Email Address: antti.peltonen@tkk.fi

Work mobile number: +358 50 384 1689
Room 2170

Aila Blomberg

Communications Officer
Micronova communications

Email Address: aila.blomberg@tkk.fi
Work mobile number: +358 50 541 8829
Room 4160

• Responsible for publishing Micronova Newsletter and contents of Micronova www-pages
• Responsible for internal communication within Micronova (VTT and Aalto)
• Contacts to VTT and Aalto communications

You can turn to me in any communications matters concerning Micronova, in case you cannot find the information you are looking for, or if you wish to send us feedback.

Micronova is the leading research centre for micro and nanotechnology in Finland. It is part of Otaniemi Science Park, which is the largest technology hub in the Nordic countries. Micronova is jointly run by VTT, Technical Research Centre in Finland and Aalto University. Over 300 researchers from VTT, Aalto University and several companies work at Micronova. Most of the R&D work is done in close cooperation with partners at universities, research institutes and companies in and outside Finland. Micronova offers the largest clean room facilities in the Nordic countries.