VTT Nanofabrication Centre has been granted an ISO9001:2008 certificate for fabrication and small-volume production of materials and devices for micro-, nano- and optoelectronic applications, wafer processing subcontracting services and facility maintenance. The procedures described in the quality documentation apply also to the work performed by VTT Memsfab and any other parties using the cleanroom.
By working according to the guidelines we strive to continuously improve the services to our customers, reduce lot throughput time, improve yield and minimize process equipment downtime.
Our process registration database is the basis of the quality system. By logging all equipment use and maintenance we ensure full traceability of process steps, lot following and statistical data. Through monitoring of standard recipes we check the stability of the critical equipment.
Customer reclamations and internally detected problems are handled by the 8D-method. By implementing corrective and preventive actions we aim to prevent recurrence of non-conformities.
Through preventive actions and training we create a safe work environment and aim to prevent accidents.
VTT at Micronova
Tel. +358 20 722 6664
Email: ulrika.gyllenberg [at] vtt [dot] fi
Aalto at Micronova
Director of Aalto Nanofab
Tel. +358 9 470 26075
Email: veli-matti.airaksinen [at] aalto [dot] fi
Hannu Kattelus, CEO
Tel. +358 40 506 9316
Fax +358 20 722 7012
hannu.kattelus [at] vtt [dot] fi