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Micronova Nanofabrication Cleanroom

Micronova Nanofabrication Cleanroom is listed as a National Research Infrastructure by the Finnish Ministry of Education. It is an open access facility. Process and measurement equipment can be used according to separate agreements by other universities, research institutes and companies.

is in joint use by VTT Technical Research Centre of Finland (VTT) and Aalto University. There are also areas dedicated to use by guest companies, and companies can also rent more limited space for their own equipment.

The maintenance of cleanroom conditions, infrastructure and media as well as process and measurement equipment is handled by the Nanofabrication Centre staff (VTT and Aalto).

The finger structure of the cleanroom allows for dedicated areas for processes such as lithography, plasma etching, wet processing, oxidation and CVD furnace processes, sputtering, wafer bonding, electrochemical deposition, ion implantation, measurements and analysis.