Thin Film Processing

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Superconducting thin films
Ferro- and piezoelectric thin films

Equipment:

  • Lithography
  • PECVD for silicon oxide, nitride and oxynitride
  • RIE
  • PVD - multichamber systems for AC and DC magnetron sputtering of various materials

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For a closer desciption of process equipment click here. Or visit our equipment booking system LIMS.