Main process technologies

The Micronova Nanofabrication Cleanroom and Laboratories provide the necessary facilities for a large number of processes. Mainly processes are run on silicon or quartz wafers. For MEMS and CMOS the wafer size is 150 mm but some processes are available for 100 mm or 200 mm wafers. III-V materials are used for…..



For a closer desciption of process equipment click here. Or visit our equipment booking system LIMS.