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SCANNING ELECTRON MICROSCOPE, ZEISS DSM-950

Year of Manufacture and Installation:

Model manufactured since 1985 / 1996

Description:

Standard SEM with tungsten source and SE (secondary electron) detector for non-critical observation outside the cleanroom.

Key Features and Accessories:

Completely manual system for maximum control. Contains multiple electrical feedthroughs into the vacuum chamber, making it ideal for non-standard experimental use and imaging (with main user supervision) e.g. electrically activated microsystems, voltage contrast etc. Vacuum system has turbopump, sample stage is 5-axis goniometer type. Accessory ports for BSE, EDX and other equipment (not installed). Image grabbing capability at video resolution.

Key Specifications:

• Magnification 300 000x maximum (100 000x easily achieved)
• Acceleration voltage 1-30 kV
• Electron source Tungsten filament
• Detector SE (Secondary electron)

Substrate Size:

5 mm - 30 mm

Allowed Materials:

All vacuum compatible materials

Forbidden Materials:

Dirty, sticky, oily, wet or otherwise vacuum-detrimental samples

Availability and Cost:

Availability Class: F (Use allowed for all researchers with permission.)
Price Category: Medium

Name, Model and Manufacturer:

Scanning Electron Microscope (SEM),
DSM-950,
Zeiss (Opton)

Location:

Nanofab 1152