Acoustic microscope (E03)


Equipment name: E03 Acoustic microscope

Manufacturer: Sonix

Model: HS3000 


Acoustic microscope for void detection from bonded interfaces. The measurement takes place either in the water or under a water fall.

Key Features and Accessories:

Motorized stage for sample movement. Conductive tips can be used for electrical measurements. All signals can be accessed through a signal access module. 

Key Specifications:

Able to detect voids >10µm. Able to scan sample sizes up to 200mm.

Substrate Size:


Allowed Materials:

Tool is IC-compatible, so avoid contaminating or use another tank inside the tank.

Forbidden Materials:


Tommi Suni

tommi.suni [at] vtt [dot] fi