Micronova Nanofabrication Centre is listed as a National Research Infrastructure by the Finnish Ministry of Education and Culture. Nanofab is an open access facility, and our process and measurement equipment available for use by other universities, research institutes and companies.
The cleanroom covers an area of 2 600 m2. It is a clean bay – service chase type of cleanroom, with clean areas dedicated to various processing and analysis activities. The classification ranges from ISO4 in lithography and CMOS-sections, ISO5 in most processing areas to ISO6 in areas dedicated to measurements and gowning.
In addition to this main cleanroom there are laboratories with built-in cleanrooms for micropackaging and back-end processes as well as well-equipped and controlled labs for MOVPE, MBE and other thin film processes.
The cleanroom was built in two phases. The first 1 100 m2 part was commissioned in 1997 and rebuilt and refurbished in 2006. The extension part, 1 500 m2, was commissioned in 2002.
VTT at Micronova
Tel. +358 20 722 6664
Email: ulrika.gyllenberg [at] vtt [dot] fi
Aalto at Micronova
Director of Aalto Nanofab
Tel. +358 9 470 26075
Email: veli-matti.airaksinen [at] aalto [dot] fi
Hannu Kattelus, CEO
Tel. +358 40 506 9316
Fax +358 20 722 7012
hannu.kattelus [at] vtt [dot] fi