Nanofabrication Centre's Personnel

	Ulrika Gyllenberg Technology Manager Email Address: ulrika.gyllenberg@vtt.fi Office phone number: + 358 20 722 6664 Work mobile number: + 358 40 541 6184 Room 2113 General cleanroom operations Equipment use agreements, processing services, basic cleanroom training, functional cleanroom design. Quality management.
	Veli-Matti Airaksinen Director, Ph.D. Email Address: veli-matti.airaksinen@tkk.fi Office phone number: +358 9 470 26075 Work mobile number: +358 50 341 4766 Room 2167 In charge of Aalto Nanofab - Micronova Nanofabrication Centre, Faculty of Electronics, Automation and Communications School of Science and Technology Aalto University. Aalto Nanofab provides device processing facilities and services for researchers at Aalto. You are welcome to contact me with any enquiries about the use of the Aalto equipment and facilities at Micronova.
	Aila Blomberg Communications Officer Micronova communications Email Address: aila.blomberg@tkk.fi Work mobile number: +358 50 541 8829 Room 4160 Responsible for publishing Micronova Newsletter and contents of Micronova www-pages Responsible for internal communication within Micronova (VTT and Aalto) Contacts to VTT and Aalto communications You can turn to me in any communications matters concerning Micronova, in case you cannot find the information you are looking for, or if you wish to send us feedback.
	Pasi Haapasalo Technician Email Address: pasi.haapasalo@vtt.fi Office phone number: +358 20 722 6638 Work mobile number: +358 40 161 2986 Room 2114 Responsible for the gas supply system and gas and liquid nitrogen requisitions. Equipment maintenance responsibilities: mask aligners, resist and developer tracks.
	Erkki Halonen Senior Research Technician Email Address: erkki.halonen@tkk.fi Office phone number: +358 9 470 26076 Work mobile number: +358 50 520 8547 Room 2171
	Paula Heikkilä Process Engineer Email Address: paula.heikkilae@tkk.fi Office phone number: +358 9 470 26051 Work mobile number: +358 50 541 8832 Room 2171 Responsible for the cleanrooms Saftety training for the cleanrooms Responsible for keys and clean room access at Micronova Processing, e.g. oxides, nitrides, litography, sputtering
	Arja Hjelt Secretary Email Address: arja.hjelt@tkk.fi Office phone number: +358 9 470 22357 Work mobile number: +358 40 560 7344 Room 2168
	Tommy Holmqvist Coordinator, D.Sc. (Tech) Email Address: Tommy Holmqvist@vtt.fi Office phone number: +358 20 722 111 Work mobile number: +358 50 566 3497 Room 250 Coordinator of Micronova Nanofabrication Centre external services and internal equipment usage. Expert in e-beam lithography.
	Jukka Huhtala Senior Research Assistant Email Address: jukka.huhtala@vtt.fi Office phone number: +358 20 722 6632 Work mobile number: +358 40 541 6183 Room 2115 Responsible for maintenance of silicon and oxide DRIE-etchers, lithography equipment (resist and developer tracks, ovens, spinners) and plasma strippers. Member of the on-call team.
	Pekka Ikonen Work Technician Email Address: pekka.ikonen@vtt.fi Office phone number: +358 20 722 6634 Work mobile number: +358 40 541 6182 Room 2115 Responsible for maintenance of sputter equipment (Provac), ion implanter and PECVD-tools. Member of the on-call team.
	Harri Ilmari Research Engineer Email Address: harri.ilmari@vtt.fi Office phone number: +358 20 722 6304 Work mobile number: +358 40 709 8941 Room 2116 Responsible for maintenance of all wet benches and fumehoods, as well as for chemical supply systems. Quality assistant.
	Jukka Lappeteläinen Technician Email Address: jukka lappeteläinen@vtt.fi Office phone number: + 358 20 722 6643 Work mobile number: + 358 40 757 5607 Room 2111 Team leader: Equipment maintenance Coordinates and approves all equipment installations, responsible for maintenance of sputter equipment, ALD-reactor, SEM’s and nanoimprinting tool. Member of the on-call team.
	Jarmo Määttä Research Assistant Email Address: jarmo.maatta@vtt.fi Office phone number: +358 20 722 7294 Work mobile number: +358 40 528 9268 Room 2106 Receiving chemicals and other materials and cleaning of materials before moving them to the cleanroom. Responsible for chemical storage rooms.
	Jukka Nurminen Maintenance Technician Email Address: jukka.nurminen@vtt.fi Office phone number: +358 20 722 6659 Work mobile number: +358 40 530 2669 Room 2110 Team Leader: Cleanroom Facilities Main responsibility for building automation system, filter fan units and cleanroom measurements. Responsible for maintenance of diffusion furnaces and spin rinse dryers. Head of the on-call team.
	Victor Ovtchinnikov Senior Research Scientist Email Address: victor.ovtchinnikov@tkk.fi Office phone number: +358 9 470 24988 Work mobile number: +358 50 352 3319 Room 2170 Research in the field of electrical conductivity of silicon implanted SiO2. Ion-beam mixing of multilayer a-Si/SiO2 and Ag/SiO2 structures by Ar and Kr ions for creating of silicon and silver nanoclusters. The structures can be used in optoelectronics and SERS applications. Microfabrication of free standing metal structures. Application of these structures for fabrication of high-impedance surfaces and RF MEMS. Responsible for the project "MEMS based reconfigurable high-impedance surfaces for millimetre and submillimetre wave applications". Responsible for equipment: ion implanter, OPT sputter, OPT RIE, OPT PECVD, LOMO maskaligner.
	Antti Peltonen Process Engineer Email Address: antti.peltonen@tkk.fi Work mobile number: +358 50 384 1689 Room 2170
	Jukka Pihlainen Technician Email Address: jukka.pihlainen@vtt.fi Office phone number: +358 20 722 4761 Work mobile number: +358 40 534 2528 Room 2116 Responsible for fire detection, alarm and extinguishing systems as well as toxic gas alarm system. Responsible for maintenance of wafer bonders and bond aligners, flip-chip bonders and dicing saws.
	Jyrki Repo Real Estate Co-ordinator Email Address: jyrki.repo@vtt.fi Office phone number: +358 20 722 6314 Work mobile number: +358 40 544 7049 Room 316 Team Leader: Safety Responsible for safety and environmental issues, including personnel and structural safety systems, as well as problem wastes. Member of the on-call team.
	Risto Salo Senior Research Technician Email Address: risto.salo@tkk.fi Office phone number: +358 9 470 24674 Work mobile number: +358 50 568 0372 Room 2172 In charge of cleanroom safety and maintenance. Handles gas and equipment installations Responsible for chemical safety and waste chemicals In charge of the workshop
	Harri Sillanpää Maintenance Technician Email Address: harri sillanpaa@vtt.fi Office phone number: +358 20 722 4788 Work mobile number: +358 40 530 2667 Room 2110 Responsible for cleanroom ventilation, DI-water plant and distribution system, cooling compressors and process cooling system, neutralization plant and process drain systems as well as several other cleanroom support systems. Member of the on-call team.
	Unto Suominen Senior Research Assistant Email Address: unto.suominen@vtt.fi Office phone number: +358 20 722 6689 Work mobile number: +358 400 267 946 Room 2114 Responsible for maintenance of LAM etchers, sputtering equipment and RIE-tool.
	Vesa Wegelius Research Engineer Email Address: vesa.wegelius@vtt.fi Office phone number: +358 20 722 6647 Work mobile number: +358 40 750 1812 Room 2111 Main responsibility of electrical supply systems, including bus bars. Competence as leader of electrical installation work for the Micronova building. Responsible for maintenance of CMP and wafer backgrinder equipment, brush cleaner and some lithography equipment (spinners and ovens).