VTT wafer processing equipment in Micronova
LITHOGRAPHY, WET PROCESSING
| Wafer stepper | Canon | 2500 | i3 iline (0.4 μm CD) |
| Mask aligner | Süss | MA150 | 2side, automatic |
| Mask aligner | Süss | MA200 | automatic |
| Mask aligner | Süss | MA6 | 2side |
| Nanoimprinting stepper | Süss | NPS200 | |
| ebeam (in SEM) | LEO | 1560 / Elphyplus | |
| Resist track | AOI | Duna700 | SVG88 series |
| Resist track | Süss | ACS200 | |
| Manual spinners | various | ||
| UV photostabilizer | Fusion | ||
| Primer ovens | YES | ||
| Resist ovens | Memmert, Heraeus | ||
| IR baker | Micro Resist | ||
| Hot plates | BLE, Hamatech | ||
| Spin rinse driers | various | ||
| Cold Strip | Legacy Systems | ||
| HF Vapor Etcher | Primaxx | MEMSCET | |
| CO2 supercritical dryer | BalTec | CPD 408 | |
| Anisotropic silicon etch | TMAH | ||
| Wet benches | Stangl, PM Plast | ||
| Fume hoods | Stangl, Lotus |
PLASMA ETCHING
| Deep Si etcher | Aviza | Omega i2L | automatic |
| Deep Si etcher | STS | ASE | |
| Oxide etcher | LAM | 4520 | oxides, nitride |
| Polysilicon / nitride etcher | LAM | 4420 | nitride, poly, Mo |
| Metal etcher | LAM | TCP9600 | Al, TiW, Nb, oxides |
| Plasma stripper | PRS | 801 | |
| Microwave asher | GaSonics | Aura A1000 | |
| Oxide ICP etcher | STS | AOE | |
| Reactive Ion Etcher | Oxford | Plasmalab 80+ |
IMPLANTATION, DIFFUSION, ANNEALING, OXIDATION
| Ion implanter | Axcelis | NV8200 | |
| Furnaces | Centrotherm | E2000 |
DEPOSITION
| LPCVD | Centrotherm | E2000 | nitride, LTO, TEOS, poly |
| Sputtering | Provac | Balzers LLS801 | AlSi, Mo, TiW, Si |
| Sputtering | TEL | MARK IV | TiW, Cu |
| Sputtering | MRC | 903 | |
| Sputtering | VonArdenne | CS 730 S | 9 targets |
| PECVD | STS | nitride, oxide | |
| ALD | Picosun | SUNALE R150B | Al2O3, TiO2 |
| Evaporator | JoSa |
WAFER ENGINEERING
| Wafer bonder | EVG | 520IS | |
| Bond aligner | EVG | 620 | |
| CMP | Strasbaugh | 6DSSP | |
| CMP | Strasbaugh | 6EC | metal polishing |
| Grinding | Strasbaugh | 7AF | |
| Thickness gage | ADE | 9500 | |
| Acoustic microscope | Sonix | HS3000 | |
| PostCMP cleaning | Stangl | ||
| Brush clean | Corwet |
PLATING
| Plating wet benches | PM Plast, Rena | PbSn, Ni, Cu, flash Au | |
| Oven | ATV |
ANALYSIS
| SEM | LEO | Supra 35 | |
| SEM/EDX | LEO | 1560 | |
| AFM | Digital Instr. | 3100 | |
| Microscopes | various | ||
| Reflectometer | FilmTek | 4000 | |
| Reflectometer | NanoSpec | AFT 4150 | |
| Ellipsometer | Plasmos | ||
| Profilometers | Veeco | Dektak | |
| Optical profilometer | Veeco | Wyko | |
| Flipchip bonders | Süss | FC150 | |
| Four point probes | |||
| Probe stations | Süss, Cascade, R&K | ||
| Surface particle detector |
DICING, WIRE BONDING
| Dicing saw | Disco | ||
| Dicing saw | Loadpoint | ||
| Wedge bonder | Delvotec |
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