Micronova Cleanrooms
The MICRONOVA cleanroom
The core of the Micronova building is the 2 600 m2 cleanroom, ISO 4 (10) ... ISO 7 (10 000), with its state-of-the-art equipment for fabrication of MEMS, CMOS and thin film devices.
The cleanroom was built in two phases, the older one, with an area of 1 100 m2 is used only by VTT, while the newer one which was completed in 2002 is in joint use by VTT and TKK and also offers dedicated space for customers.
The cleanroom is of the clean bay-service chase type, with a raised access floor and the ventilation based on filter fan units. The cleanroom installation occupies four floors of the Micronova building.
The actual cleanroom is on the second floor, above it is a plenum. The subfab area below the cleanroom offers space for auxiliary equipment such as vacuum pumps, transformers and chillers, but also holds the DI-water plant, neutralization plant, cooling compressors and storage rooms for chemicals and waste chemicals.
The gas storage rooms
are located outside the building. Laboratories equipped with the same
facilities as the cleanroom are also located on the first floor. The activities
include MOVPE, MBE, micropackaging and several thin film processes. The
fourth floor is the plant room for the air handling units and exhaust
fans.
Technical Specifications of the Cleanrooms
- 2 make-up air handling units ( 20 m3/s)
- 6 recirculation air handling units
- 210 Filter Fan Units (EU 15)
- Exhaust air systems for
- chemicals (scrubber)
- solvents
- toxic gases
- vacuum pumps
- DI-water, 18.2 MOhm·cm, 10 m3/hr (VLSI-grade)
- Drains: neutralization, HF, solvents
- Closed loop process cooling water
- House vacuum
- Oil-free compressed air, dew point - 70 °C
- Bulk gases: nitrogen (3 qualities), oxygen, hydrogen, argon
- Process gases
- Toxic gas alarm system
- Sampling fire alarm system
- Bus bar electrical power system
Suomenkielinen käännös
Tällä sivulla ei ole suomenkielistä käännöstä!
Vaihda tästä kieleksi englanti.