Sensors and Detectors
Microphone package with a
readout chip.
Sensors and detectors is one of the most important application areas
for micro- and nanotechnologies.
Micronova’s expertise in microsystems,
optics, superconductivity, quantum mechanics and radio-frequency techniques,
combined with bio- and chemical technology is used for the development
of single sensors, sensor arrays, and related electronics and packaging.
Our technology base covers most of the electromagnetic spectrum, including
- x-ray, UV, visible, IR, submillimetre, micro and radio waves- opening
new avenues when these sensors are combined with remote sensing. In addition,
we develop chemical and biological sensing technologies.
Timo Varpula, timo.varpula@vtt.fi, tel. +358 20 722 6412
Harri Lipsanen, harri.lipsanen@tkk.fi, tel. +358 9 451 3123
Juha Sinkkonen, juha.sinkkonen@tkk.fi, tel. +358 9 451 2320
Chemical and Biosensors
We develop gas sensors based on semiconductors, surface acoustic wave (SAW) devices, and microstructured fibres. Our biosensors are based on the fluidic devices.
Ari Hokkanen, ari.hokkanen@vtt.fi, tel. +358 20 722 4525
Matti Kaivola, matti.kaivola@tkk.fi, tel. + 358 9 451 3151
Hanne Ludvigsen, hanne.ludvigsen@tkk.fi, tel. +358 9 451 2282
Pekka Kuivalainen, pekka.kuivalainen@tkk.fi, tel. +358 9 451 2321
MEMS Sensors
We have a long time experience of a wide range of MEMS sensors, for example, pressure sensors, silicon microphones integrated with ASIC, 3D micro compass on one chip, MEMS based voltage references, ultrasonic transducers and acoustic emission detectors. We have developed also low noise readout electronics for these sensors.
Anu Kärkkäinen, anu.karkkainen@vtt.fi, tel. +358 20 722 4377
Ilkka Tittonen, ilkka.tittonen@tkk.fi, tel. +358 9 451 2287
Thermal Sensors
Thermal sensors developed at Micronova include microbolometers, nanocalorimeters and cryogenic temperature sensors.
Timo Varpula, timo.varpula@vtt.fi, tel. +358 20 722 6412
Radiation Detectors
Our radiation detector technologies include particle detectors, X-ray detectors, and UV photodetectors.
Simo Eränen, simo.eranen@vtt.fi, tel. +358 20 722 6661
Harri Lipsanen, harri.lipsanen@tkk.fi, tel. +358 9 451 3123
Quantum sensors and detectors
We develop ultra high resolution SQUID sensors, superconducting detectors, detector arrays and their multiplexing readout techniques, e.g., for MEG, THz imaging and X-ray imaging applications. We develop also components and applications for quantum metrology, such as novel Josephson voltage standards and the quantum metrology triangle. See quantum sensors
Panu Helistö, panu.helisto@vtt.fi, tel. +358 20 722 6827
RFID and wireless sensors
We develop radiofrequency identification (RFID) systems and wireless sensors operating at HF (13.56 MHz), UHF (865-954 MHz) and 2.45 GHz. Our RFID activities span from technology development - RFID readers and modules, tags, sensors as well as antennas - to application-spesific research including e.g. logistics, traffic, recycling, industrial sensor development etc. VTT is also developing technologies for printed RFID tags and sensors.
Kaj Nummila, kaj.nummila@vtt.fi, tel. +358 20 722 5773
Other Sensors
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