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Nanotechnology

Nanotechnology activities in Micronova include a large variety of topics in nano-optics and nanophotonics, nanoelectronics, nanofabrication, nanomaterials and nanocharacterisation. Nanophotonic devices based on photonic crystals and photonic crystal fibers are fabricated and studied.

Semiconductor nanostructures such as quantum dots and nanowires are processed by both self-assembly and nanolithography.These nanostructures are applied to optoelectronic and electronic devices fabricated by epitaxy of compound semiconductors. Silicon-on-insulator (SOI) technology is exploited in fabrication of nanoelectronics devices. Atomic layer deposition is applied in various nanofabrication processes.

Jouni Ahopelto, jouni.ahopelto@vtt.fi, tel. +358 20 722 6644
Harri Lipsanen, harri.lipsanen@tkk.fi, tel. +358 9 451 3123


Interdisciplinary research subjects

Due to the interdisciplinary nature of nanotechnology, most of its research subjects overlap with the other areas of technology expertise at Micronova. Thus, the following subjects are described under other technology areas:

  • Quantum dots on compound semiconductors => Photonics and optics (Semiconductor optoelectronics)
  • Nano-optics and nanophotonics => Photonics and optics (Nano-optics)
  • Photonic crystal fibers => Photonics and optics (Fiber optics and optical networks)
  • Nanoelectronics => Micro- and nanoelectronics (Nanoelectronics)
  • Quantum electronics => Micro- and nanoelectronics (Quantum electronics)
  • Quantum sensors and detectors => Sensors and detectors (Quantum sensors and detectors)

Nanofabrication and novel nanomaterials

Nanofabrication utilises nanoimprint lithography, electron beam lithography, ALD, epitaxy of compound semiconductors (MOVPE, MBE) and advanced dry etching processes combined with usual microfabrication techniques. Full silicon process line is also available for fabrication of nanodevices. Novel nanomaterials are developed from structures based on nanolaminates, functional nanostructures and bioinspired structures.

Jouni Ahopelto, jouni.ahopelto@vtt.fi, tel. +358 20 722 6644
Harri Lipsanen, harri.lipsanen@tkk.fi, tel. +358 9 451 3123

 

Characterisation of nanostructures

Nanostructures can be characterised with techniques such as scanning electron microscopy, scanning probe microscopy, optical spectroscopy, spectroscopic ellipsometry and advanced X-ray diffraction and X-ray reflectance. Transport measurements at low temperatures and high magnetic fields are available for electrical characterisation.

Mika Prunnila, mika.prunnila@vtt.fi, tel. +358 20 722 6668
Harri Lipsanen, harri.lipsanen@tkk.fi, tel. +358 9 451 3123

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