• Front Page
• Micronova in Brief
  • Services
  • Board of Directors
• News & Events
  • Events
  • News
• Expertise
  • Micro and Nanoelectronics
  • Microsystems
  • Microwave & Millimeter Wave Technology
  • Nanotechnology
  • Photonics & Optics
  • Printed Electronics
  • Sensors & Detectors
• Nanofabrication Centre
  • Services
  • Cleanrooms
  • Users & Clanroom layout
  • Main Process Technologies
  • Equipment
  • Infrastructure and Media
    • General description
    • Ventilation
    • Exhaust Systems
    • Gas Supply
    • DI-Water
    • Drains
    • Other Supply Systems
    • Fire Protection
    • Alarm Systems
  • Safety Instructions
  • Other Instructions
  • Contact information
  • Equipment Booking System
• Research Groups
  • VTT @ Micronova
  • Aalto @ Micronova
    • Department of Micro and Nanosciences (MNT)
    • Optics & Molecular Materials Laboratory (OMM)
    • Laboratory of Electronics Production Technology (EPT)
    • Low Temperature Laboratory (LTL)
    • TKK Micronova
• Education
  • Undergraduate Courses
  • Postgraduate Courses
  • Major Subjects
  • International Master's Programme
• Contacts
  • Location and Public Transport
• Links

• Etusivu
• Micronovan esittely
  • Palvelut
  • Johtokunta
• Ajankohtaista
  • Tapahtumia
  • Uutisia
• Teknologia-alueet
  • Micro and Nanoeletronics
  • Microsystems
  • Microwave & Millimeter Wave Technology
  • Nanotechnology
  • Photonics & Optics
  • Printed Electronics
  • Sensors & Detectors
• Nanofabrication Centre
  • Palvelut
  • Laitekanta
    • Nanofabin laitteet
  • Toimintaohjeet
• Tutkimusyksiköt
  • VTT @ Micronova
  • Aalto @ Micronova
    • Department of Micro and Nanosciences (MNT)
    • Optics & Molecular Materials Laboratory (OMM)
    • Laboratory of Electronics Production Technology (EPT)
    • Low Temperature Laboratory (LTL)
    • TKK Micronova
• Opetus
  • Undergraduate Courses
  • Postgraduate Courses
  • Major Subjects
  • International Master's Programme
• Yhteystiedot
  • Location and Public Transport
• Linkkejä

Micro and Nanoelectronics

Microelectronics development at Micronova cover device physics, fabrication technologies and circuit design.

Markku Åberg, markku.aberg@vtt.fi, tel.  +358 20 722 6619
Pekka Kuivalainen, pekka.kuivalainen@tkk.fi, tel. +358 9 451 2321

IC Technology

The IC technology activity covers analog-digital CMOS and BiCMOS process research. The minimum line-width in our processes is 0.6 µm. The full line is presently running on 100 mm wafer size but it is gradually being upgraded to 150 mm.

Hannu Ronkainen, hannu.ronkainen@vtt.fi, tel. +358 20 722 6660

 

IC Design

Our IC design activities concentrate on two areas: fast analog circuits and system-on-chip. Telecommunications and sensor interfacing are key applications.

Markku Åberg, markku.aberg@vtt.fi, tel.  +358 20 722 6619

 

Defects in Silicon

We are studying oxygen precipitation and related crystal defects, gettering of metallic impurities in silicon wafers and the lifetime of charge carriers.

Hele Savin, hele.savin@tkk.fi, tel. + 358 451 2327

 

Nanoelectronics

Nanoelectronics research uses both electron beam and imprint lithographies. Electronic transport in silicon nanostructures and mesoscopic physics are studied.

Jouni Ahopelto, jouni.ahopelto@vtt.fi, tel. +358 20 722 6644
Jukka Pekola, jukka.pekola@tkk.fi, tel. +358 9 451 4913

Quantum electronics

We develop superconducting electronics such as low dissipation Rapid Single Flux Quantum (RSFQ) circuits for mK temperatures. One possible application is quantum computing with superconducting qubits see more here.

Panu Helistö, panu.helisto@vtt.fi, tel. + 358 20 722 6827

Spintronics

Spintronics research concentrates on dilute magnetic semiconductors like GaAs:Mn and GaN:Mn. MBE growth, materials charcaterisation and device fabrication are being studied.

Pekka Kuivalainen, pekka.kuivalainen@tkk.fi, tel. +358 9 451 2321

 

FBAR

We have a long experience in the field of thin film bulk acoustic wave devices. FBAR offer high Q-values in a small, low cost chip size for wireless communication systems up to 10 GHz.

Suomenkielinen käännös

Tällä sivulla ei ole suomenkielistä käännöstä!

Vaihda tästä kieleksi englanti.