MICRONOVA in Brief
Micronova interior
Micronova, is a unique center for the design, development and fabrication of micro- and nanosystems. Micronova is also an official National Research Infrastructure since 2008.
Micronova is jointly run by the VTT Technical Research Centre of Finland and Aalto University School of Science and Technology.
Our mission is to develop innovative, enabling technologies, and by working closely with industry use these new possibilities in practical and commercial applications and systems.
Our expert areas of applications include sensors based on microelectromechanical systems (MEMS), optical and wireless sensors, wireless communications and photonics systems, biosensors and fluidistics, nano and quantum devices, and millimeter wave and optical instruments for space applications.
Micronova's modern facilities, completed in 2002, include 2600 m2 of cleanrooms and processing lines for silicon BiCMOS, MEMS, III-V optoelectronics and thin film devices. In addition, Micronova houses extensive laboratories for electrical and optical measurements and various types of materials characterisation.
About 360 researcher work at Micronova from VTT, Aalto University School of Science and Technology, and from several companies. Micronova contains all parts of the micro-nano innovation chain, from developing basic research and technologies to prototype development, and small scale manufacturing. Most of our R&D is done in close cooperation with our partners at universities, research institutes and companies both in and outside Finland. Our services and facilities are flexibly available to users from outside the centre.
Furthermore, teaching is an integral and important part of Micronova's activities. Courses in micro- technology, nanotechnology and photonics are offered for both undergraduate and graduate students.
Micronova is located in the Otaniemi Technology Campus in the City of Espoo, Finland. With over 5000 researchers, Otaniemi is one of the leading Technology Parks in Europe, and the home of the two leading technical research and education organisations in Finland, VTT and TKK. In addition, several other research centres and 170 high-tech companies are located in Otaniemi.
The following companies are currently using Micronova’s R&D facilities:
| Ajat Oy | X-ray imaging systems |
| Lumilaser Oy | Epitaxial compound semiconductor structures |
| Nilas Oy | Masks for photolithography |
| OptoGaN Oy | GaN for light emitters |
| Picosun Oy | Atomic Layer Deposition tools for nanotechnology |
| Prismasonic | Anamorphic lenses |
| Silecs Oy | Dielectric materials for microelectronics |
| Vaisala Oy | Meteorological and environmental measurement systems |
See Micronova's presentation video: small (192x144) / medium (320x240) / large (512x384).
MICRONOVA lyhyesti
Näkymä Micronovan aulaan
Micronova on Suomen johtava mikro- ja nanoteknologian tutkimuskeskus, joka sijaitsee Pohjoismaiden suurimmalla teknologiakampuksella Espoon Otaniemessä.
Micronovassa yhdistyy sekä VTT:n että Aalto-yliopiston Teknillisen korkeakoulun tutkimusosaaminen. Micronovassa työskentelee yli 300 tutkijaa VTT:ltä ja Aalto-yliopiston Teknillisestä korkeakoulusta sekä useista yrityksistä. Mikro- ja nanovalmistustekniikan edellyttämät puhdastilat ovat Pohjoismaiden suurimmat.
Micronovassa tehtävä tutkimustyö ulottuu perusfysiikasta materiaalitutkimukseen, valmistustekniikoihin sekä toimiviin komponentteihin. Tutkimus- ja kehittämis toiminnassa perusajatuksena ovat korkeatasoiset kansainväliset monitieteiset teknologiahankkeet. Tutkimus- ja kehitystyötä tehdään yhteistyössä kotimaisten ja ulkomaisten yliopistojen, tutkimuslaitosten ja yritysten kanssa. Micronovan resurssit ovat myös yritysten ja ulkopuolisten tutkimusryhmien käytettävissä.
Katso Micronovan esittelyvideo: small (192x144) / medium (320x240) / large (512x384).