Services in brief

Micronova Nanofabrication Cleanroom is an open access facility. Process and measurement equipment can be used according to separate agreements by other universities, research institutes and companies.

The services provided by Micronova Nanofabrication Centre to external users include:


Use of Nanofab’s processing and measurement equipment. The equipment is used either by the customer’s personnel or Nanofab staff depending on type of equipment. The agreement can be made on a permanent basis (annual contracts) or for shorter periods.


Consultancy concerning process flows and equipment preference. 


Cleanroom training and safety training is given to all new Nanofab users. Equipment use training is given for specific tools by equipment’s main user before a new user can start using the equipment independently.


Small-scale processing and measurement services.


Renting of cleanroom space to customer with own, dedicated we equipment.


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