Services in brief

Micronova Nanofabrication Center houses two main cleanrooms.

The 'M2' Nanofabrication cleanroom is a joint Aalto/VTT research facility with an open access policy, where process and measurement equipment can be used according to separate agreements by other universities, research institutes and companies.

The 'M1' Pilot plant is dedicated to research and manufacturing and it is operated by VTT to offer turn-key services to industry through contract research projects or services for manufacturing through the VTT Memsfab Oy subsidiary.

The typical services provided by Micronova Nanofabrication Centre to external users include:


Use of processing and measurement equipment. The equipment in M2 is used either by the customer’s personnel or Aalto/VTT staff depending on type of equipment. The equipment in M1 is provided through contract research projects or contract manufacturing. The agreement can be made on a permanent basis (annual contracts) or for shorter periods.


Consultancy concerning process flows and equipment preference. 


Cleanroom training and safety training is given to all new users. Equipment use training is given for specific tools by equipment’s main user before a new user can start using the equipment independently.


Small-scale processing and measurement services.


Renting of cleanroom space to customer with own, dedicated we equipment.


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